Zirconia Type Oxygen Analyzers (O2 Meters)
SH-30 Series
Features
- Integrated design combining the sensor, receiver, sampling mechanism, and filter enables measurement immediately after installation
- Lightweight, compact construction allows easy installation in a wide range of equipment
- Supports trace-level concentration measurement (minimum range: 0–10 ppm)
Usage
- Semiconductor manufacturing equipment, atmosphere measurement in various N2 furnaces, air separation units
Specifications
| Model | SH-30* Series | |
|---|---|---|
| Sensor | TF-21 | |
| Receiver | DTF-201 | |
| Measuring Principle | Zirconia type concentration cell method | |
| Measuring Range |
Min. 0–10 ppm to Max. 0–25%; Any four ranges selectable with fixed zero point *Output range configurable from 0–10 ppm to 0–100% |
|
| Calibration | Air-point calibration plus up to four additional points (Calibration possible for each measurement range) | |
| Analog Output |
DC 4–20 mA, non-isolated output, load resistance ≤600 Ω DC 0–1 V / DC 0–5 V / DC 0–10 V, selectable (non-isolated output) |
|
| Sample & Calibration Gas Flow Rate | 0.3 L/min, 0.5 L/min | |
| Accuracy | Repeatability | ±1% FS (below 0–1% range), ±0.5% FS (0–1% range and above) |
| Linearity | ±3% FS (below 0–100 ppm range), ±2% FS (below 0–1% range), ±4% FS (0–1% range and above) | |
| Response Time | ≤30 seconds (below 0–1% range), ≤10 seconds (0–1% range and above) (90% response when switching calibration gas) | |
| Drift | ≤±2% FS per week | |
| Power Supply |
AC specification: AC 100–240 V ±10%, 50/60 Hz, 50 VA DC specification: DC 24 V ±10%, 50 W |
|
| Contact Input | Range switching (voltage-free contact) | |
| Contact Output |
Voltage-free relay contacts (AC 30 V / DC 24 V, 3 A, resistive load) Number of contacts: Up to 4 outputs Selectable functions: Range echo-back 1 / Range echo-back 2 / High concentration alarm / Low concentration alarm |
|
| Range Switching | Local range switching / Remote range switching / Auto range switching | |
| Output Hold Function |
Output hold value setting: No hold* / User-defined value / Value 5 seconds before fault occurrence *Output held during warm-up and analyzer fault |
|
| High/Low Concentration Alarm |
High alarm: Configurable from 0.0–9,990.0 ppm or 0.0–100.0% Low alarm: Configurable from 0.0–9,990.0 ppm or 0.0–100.0% |
|
| Communication Function |
Communication functions vary by model (RS-232C, EtherCAT®, etc.) Please contact us for details |
|
Note: The above table shows representative specifications. Specifications vary by model; please contact us for details.
Product Inquiries
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