Zirconia Type Oxygen Analyzers (O2 Meters)

TF-21D201

TF-21 Sensor
TF-21 Sensor
DTF-201 Receiver
DTF-201 Receiver

Features

  • Sensors and receiver can be installed at desired locations
  • Lightweight and compact design allows easy integration into various systems
  • Supports trace concentration measurement (minimum range: 0–10 ppm)

Usage

  • Semiconductor manufacturing equipment, atmosphere measurement in various N2 furnaces, air separation units

Specifications

Model TF-21D201 (TF-21 Sensor + DTF-201 Receiver)
Measuring Principle Zirconia type concentration cell method
Measuring Range Min. 0–10 ppm to Max. 0–25%; Any four ranges selectable with fixed zero point
*Output range configurable from 0–10 ppm to 0–100%
Calibration Air-point calibration plus up to four additional points (Calibration possible for each measurement range)
Analog Output DC 4–20 mA, non-isolated output, load resistance ≤600 Ω
DC 0–1 V / DC 0–5 V / DC 0–10 V, selectable (non-isolated output)
Sample & Calibration Gas Flow Rate 0.5 L/min
Accuracy Repeatability ±1% FS (below 0–1% range), ±0.5% FS (0–1% range and above)
Linearity ±3% FS (below 0–100 ppm range), ±2% FS (below 0–1% range), ±1% FS (0–1% range and above)
Response Time ≤30 seconds (below 0–1% range), ≤10 seconds (0–1% range and above) (90% response when switching calibration gas)
Drift ≤±2% FS per week
Power Supply AC specification: AC 100–240 V ±10%, 50/60 Hz, 50 VA
DC specification: DC 24 V ±10%, 50 W
Contact Input Range switching (voltage-free contact)
Contact Output Open collector output, DC 25 V max. 50 mA
Number of contacts: 4 outputs
Selectable functions: Analyzer fault / Range echo-back 1 / Range echo-back 2 / Range echo-back 3 / Ready / High concentration alarm / Low concentration alarm
Range Switching Local range switching / Remote range switching / Auto range switching
Output Hold Function Output hold value setting: No hold* / User-defined value / Value 5 seconds before fault occurrence
*Output held during warm-up and analyzer fault
High/Low Concentration Alarm High alarm: Configurable from 0.0–9,990.0 ppm or 0.0–100.0%
Low alarm: Configurable from 0.0–9,990.0 ppm or 0.0–100.0%
RS-232C Communication Function Transmits measurement status, error code, measurement range, and measured value
Communication cable specification: D-sub 9-pin, straight cable

Resources

Instruction Manuals

Product Inquiries

Please contact us via the link below for any questions about our Measuring Instrument Products.

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1, Aza Kamikobari, Inuyama, Aichi 484-8505, Japan

Energy Support Corporation is a member of the NGK Group.